AuToVibr

Scanning white light interferometry (SWLI) is a highly accurate method for measuring surface topographies. However, it is also susceptible to disruptive movements (vibrations) during the measurement process, which significantly impairs the accuracy of the measurement results. Due to this requirement for vibration-free environments, the use of SWLI in production environments - especially during production - is very limited.

The AuToVibr project aims to use additional data on the disruptive movements to determine the actual position of the measurement surface relative to the WLI sensor, thereby achieving passive vibration compensation. This is intended to ensure that highly accurate topography measurements are possible even in vibration-prone environments.

The potential for use close to production offers the possibility of closely monitoring the process and thus quickly detecting any errors, which saves costs and conserves resources. At the same time, the use of vibration data for vibration compensation is a cost-effective alternative to active measures, which usually require the purchase of a new WLI, while the measures researched in AuToVibr only require an adjustment of the measurement software and use a compact external vibration sensor, which can also be used cost-effectively and flexibly on existing WLI systems.